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Semiconductor Manufacturing Handbook, Second Edition

By (author) Hwaiyu Geng
ISBN 13 9781259583124 ISBN 10 1259583120 Proprietary 1259583120 EANUCC 9781259583124
Pages 704
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Thoroughly Revised, State-of-the-Art Semiconductor Design, Manufacturing, and Operations Information

Written by 70 international experts and reviewed by a seasoned technical advisory board, this fully updated resource clearly explains the cutting-edge processes used in the design and fabrication of IC chips, MEMS, sensors, and other electronic devices. Semiconductor Manufacturing Handbook, Second Edition, covers the emerging technologies that enable the Internet of Things, the Industrial Internet of Things, data analytics, artificial intelligence, augmented reality, and and smart manufacturing. You will get complete details on semiconductor fundamentals, front- and back-end processes, nanotechnology, photovoltaics, gases and chemicals, fab yield, and operations and facilities.

Nanotechnology and microsystems manufacturing

FinFET and nanoscale silicide formation

Physical design for high-performance, low-power 3D circuits

Epitaxi, anneals, RTP, and oxidation

Microlithography, etching, and ion implantations

Physical, chemical, electrochemical, and atomic layer vapor deposition

Chemical mechanical planarization

Atomic force metrology

Packaging, bonding, and interconnects

Flexible hybrid electronics

Flat-panel,flexible display electronics, and photovoltaics

Gas distribution systems

Ultrapure water and filtration

Process chemicals handling and abatement

Chemical and slurry handling systems

Yield management, CIM, and factory automation

Manufacturing execution systems

Advanced process control

Airborne molecular contamination

ESD controls in clean-room environments

Vacuum systems and RF plasma systems

IC manufacturing parts cleaning technology

Vibration and noise design

And much more